1995

,

Plasma deposited amorphous tungsten nitride diffusion barrier for metal-organic chemical vapor deposited Cu metallizations

1995

,

Comparison of amorphous nitride diffusion barrier for MOCVD-Cu metallization

1995

,

Characteristics of excimer-laser-crystalliged polysilicon films by line beam scanning method

1994

,

Performance of plasma deposited tungsten and tungsten nitride as thermally stable schottky contacts to GaAs.

1994

,

Effects of Pt/W67N33 bottom electrode on dielectric properties of BaTiO₃ thin films.