1994

,

Characterization of amorphous tungsten nitride diffusion barrier for metal-organic chemical vapor deposited Cu metallization

1994

,

Thermal stability of plasma deposited tungsten nitride thin films for VLSI devices

1993

,

TEM studies of plasma deposited tungsten and tungsten nitride

1992

,

플라즈마 증착된 tungsten nitride Layer에 의한 Al spiking 억제 효과

1991

,

In-situ crystallization of amorphous silicon films by low temperature multi-step rapid thermal annealing process