2024.11

,

High performance of ALD based Indium Tin Oxide Thin Film Transistor At sub-5nm-channel thickness

2024.11

,

Annealing Free Atomic Layer Deposited InGaZnOx Thin Film Transistor with 39.8 cm2 V-1s-1 High Field-Effect Mobility

2024.11

,

Non-volatile Anti-ferroelectric (Hf, Zr)O2 Thin Film for Lowpower and High-endurance Applications Utilizing Defect Engineering in Sputtering

2024.11

,

Low temperature (≤400 ℃) crystallization in ferroelectric hafnium zirconium oxide via DUV irradiation

2024.10

,

An Investigation on the Low Voltage Ferroelectric HZO Capacitor Deposited on Phase-Controlled W Electrode