2024.10

,

A Comprehensive Study of Ferroelectric Properties of Fluorite-Structured Hf1-xZrxO2 Thin Films Grown on Mo Electrode with Various Thicknesses and Compositions

2024.09

,

Annealing-Free Deposition of Hf0.5Zr0.5O2 Thin Film via In-Situ Crystallization Using Cyclopentadienyl-Based Precursor and Plasma-Enhanced Atomic Layer Deposition

2024.09

,

Reliability Enhancement of (Hf,Zr)O 2 Ferroelectric Thin Film Through Process Optimization of Novel Molybdenum Nitride Electrode

2024.08

,

Non-centrosymmetric crystallization in 8 nm HZO thin films via DUV irradiated defect modulation

2024.08

,

Impact of deposition temperature on structural and electrical properties of (111)-oriented Hf0.5Zr0.5O2/TiN stacks