발행물
컨퍼런스
ECS spring meeting
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Phase Transition and Related Energy Applications of (Hf, Zr)O2 Films
The Korean Ceramic Society Spring Conference
2025.04
Effect of Process Condition and Position of Dopant Layer on Ferroelectricity of Al-doped HfO2
Enhanced Ferroelectricity and Reliability in 5 nm-thick Hf0.5Zr0.5O2 film by adopting (Ti,Mo)N electrode
The 32nd Korean Conference on Semiconductors
2025.02
N-Terminated TiN Electrodes with (111) Texture for Low-Voltage Switching (0.8 V) in Ferroelectric Hf0.5Zr0.5O2 Capacitors
Temperature-dependent {111}-Texture Transfer to Hf0.5Zr0.5O2 Films from (111)-textured TiN Electrode and Its Impact on Ferroelectricity