Packaged electroosmotic pumps using porous frits for cooling integrated circuits

Capacitor with insulating nanostructure

Capacitor with conducting nanostructure

Method and device for on-chip decoupling capacitor using nanostructures as bottom

Cooling micro-channels

Method and apparatus for low temperature copper to copper bonding

Self-aligned electrodes contained within the trenches of an electroosmotic pump fabricated in silicon or glass

Electroosmotic pumps using porous frits for cooling integrated circuit stacks

Methods of forming backside connections on a wafer stack

Barrier structure against corrosion and contamination in three-dimensional (3-D) wafer-to-wafer vertical stack