,

Fabrication of Optimized Micro-Patterned Pad for High-Precision Chemical-Mechanical Polishing Process

,

Effect of Process Parameters on Material Removal in Chemical-Mechanical Polishing with Surface Structured Pads

,

Low-temperature polycrystalline Ge growth on PtSe2 for BEOL compatible devices

,

CMP Technology for Cu/Polymer Hybrid Bonding

,

Integration of Nanophotonic Structures with a Metallic Nanoporous Air Filter for Particulate Matter Monitoring