발행물
컨퍼런스
The 7th International Conference on Advanced Electromaterials, ICAE 2023
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Investigation of Copper-Ruthenium Diffusion Behavior in Ruthenium Passivated Copper Direct Bonding
대한기계학회 2023 학술대회
Performance Analysis of Magnetorheological Elastomer Pads according to Material Characteristics
International Conference on Planarization/CMP Technology, ICPT 2023
A predictive model for scratch defect numbers according to CMP Pads
Characterization of Vat Photopolymerization Additively Manufactured CMP Pads
Plasma-Assisted CMP for Planarization of Adhesive Polymers in 3D Stacked Semiconductor Devices