Class 10 (68 ㎡)

Class 10,000 (56 ㎡)

CMP Zone (83 ㎡)

Wet station/IPA vapor

Cleaning & Dry | 12”, Heat

Single Type Cleaner

Akrion / Aaron | Cleaning & Dry | 8”

Megasonic Module

Akrion / Durasonic | Contaminant Cleaning | 1~2MHz

Aerosol Spray Cleaning Module

Akrion | Contaminant Cleaning

UV/O3 Cleaner

Bioforce | Organic Removal | 185, 254nm

EBARA Brush Scrubber

EBARA | Surface Cleaning | 12” / 8”

CSY Brush scrubber (Roll type)

CSY | Surface Cleaning | 8” / 4”