Probe station

6" vacuum chuck Hot chuck & controller (RT-200ºC) Microscope (max 90x) Year: 2019

Vacuum probe station

Vacuum range (1 atm to 1 mTorr) Temperature range (77-570K or RT-500ºC) MFC (10-300 sccm) Year: 2022

4 point probe system

Pitch (1000 um) One contact lift w/ Keithley 2450 Year: 2024

4200A-SCS semiconductor parameter analyzer

I-V Source Measure Units (SMUs) Pulsed I-V Ultra-fast Pulse Measure Unit (PMU) Remote Preamplifier/Switch Module (RPM) Year: 2021, 2024

HP4156B semiconductor parameter analyzer

Current (1 fA to 1 A / 20 fA offset accuracy) Voltage (1 μA to 200 V) GPIB interface Year: 2019

HP4284A LCR meter

Accuracy (0.05%) Frequency (20Hz-1MHz) GPIB interface Year: 2019, 2024

81110A pulse generator

Single/Dual-channel pulse pattern generator 165 MHz, 10 V, 50 Ω into 50 Ω (81111A) Triggerable/PLL operation selectable Year: 2020

DPO7104 oscilloscope

Bandwidth (1 GHz) Sample rate (20.00 GSa/s) Scope channels (4 channels) Year: 2022

DSO7104B oscilloscope

Bandwidth (1 GHz) Sample rate (4 GSa/s) Scope channels (4 channels) Year: 2019

Oxide sputter system

Target (IGZO, ITO, HZO, HfO2, ZrO2) Wafer size (<4 inch) Loadlock / Heater (max 500ºC) Year: 2023