Hot plate & Stirrer
Temperature range (50-550ºC) Stir range (60-1150 rpm) Size (5 x 7 inches) Year: 2022
Ultrasonic
Capacity (20 L) Temperature range (RT-70ºC) Time range (1-99 min) Year: 2024
Spectroscopic ellipsometer
Wavelength range (250-840 nm) Measurement items (thickness, n, k) Sample size (200 x 200 mm) Year: 2023
Optical microscopy
Bright field/Dark field illumination Objective lens magnification (5x to 20x) Widefield eyepiece magnification (10x) Year: 2024
Hall effect measurement system
Current (1 nA to 20 mA) Low temp. measurement (77 K) Magnetic flux density (0.51 T) Year: 2025
Ozone generator
w/ ALD Ozone concentration: 335 g/Nm^3 Ozone flow range: 1 slm ~ 20 slm Year: 2024
Gas scrubber
Adsorbent (for ozone) Volume: 100 LPM Exhausting rate: above 1.0 m^3/min Year: 2025
Vacuum desiccator
Size (W310 x D350 x H710 mm) Pressure gauge Vacuum pump Year: 2022, 2023