발행물
컨퍼런스
26th Annual Meeting of the American Society for Precision Engineering
2011
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Static stiffness tuning method of linear motion guide of machine tool
9th Japan-Finland Joint Symposium on Optics in Engineering
Simultaneous measurement of the surface-shape and the absolute optical thickness of a glass parallel by wavelength tuning interferometry
22nd International Commission for Optics
Measurement of absolute optical thickness by wavelength tuning interferometer
4th International Conference on Positioning Technology
2010
Thermal deformation prediction of concerned point of machine tool
10th International Symposium on Measurement and Quality Control
Measurement of absolute optical thickness distribution of semiconductor wafer using a wavelength tuning interferometer