발행물
컨퍼런스
SPIE Optical Engineering + Applications
2014
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Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer
SPIE Photonics Europe
Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer
SPIE Advanced Lithography
Design of the phase-shifting algorithm for the flatness measurement of a mask blank glass
3rd International Topical Meeting on Optical Sensing and Artificial Vision
2013
Optical testing by absolute length measurement with wavelength tuning interferometer
SPIE Optical Metrology
Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry