발행물
컨퍼런스
International Symposium on Green Manufacturing and Applications (ISGMA)
2017
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Measurement of surface and thickness of optical parallel plate using wavelength tuning
7th International Conference on Manufacturing, Machine Design and Tribology (ICMDT)
Precision surface measurement of ITO thin film using wavelength tuning Fizeau interferometer
18th CIRP Conference on Electro Physical and Chemical Machining
2016
Laser-assisted machining of zirconia ceramics using a diamond bur
SPIE Advanced Lithography
Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer
11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI)
2014
Absolute interferometric test for high numerical-aperture spherical concaves: gravitational effect