발행물
컨퍼런스
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM)
2024
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Artificial phase shifter based on deep learning for high-precision optical interferometry
SPIE Photonics Europe
Phase-shifting algorithm using a single interferogram and deep learning
International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN)
2023
Interferometric profiling of wafer surface using deep learning and two-frame interferometry
Annual Meeting of American Society for Precision Engineering (ASPE)
Phase unwrapping method for optical metrology based on deep learning
International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
Single-frame phase extraction for measuring geometric properties of optical components based on deep learning