발행물
컨퍼런스
SPIE Optical Metrology
2023
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A novel phase-extraction method based on deep learning for estimating geometric properties of optical flat
9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT)
Design and assessment of air-bearing spindle of metal matrix composites
Surface profiling of silicon wafer using wavelength-scanning Fizeau interferometer and Gaussian window function
Flexible phase-extraction formula for simultaneous profiling of thickness and surface of optical flat using Fizeau interferometer
International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN)
2022
Thickness profiling of a large-aperture transparent plate immune to nonlinear errors