발행물
컨퍼런스
International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN)
2022
,
Phase-extraction formula for surface profiling of optical flat using wavelength-tuning interferometer
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM)
A novel phase extracting method for thickness profiling of a transparent optical flat
SPIE Photonics Europe
Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate
Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry
SPIE Photonics West
Measurement of highly reflective surface compensating correlated error by sampling window