발행물
컨퍼런스
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM)
2019
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Design of polynomial window function for measurement of silicon wafer using wavelength tuning interferometry
Wavelength tuned phase shifting interferometry – Development of phase shifting algorithm
SPIE Optics + Optoelectronics
Interferometric precision measurement of highly reflective thin film using wavelength tuning Fizeau interferometry
2018
Absolute optical thickness measurement of transparent plate using Fourier analysis and unwrapping correlation
SPIE Photonics Europe
Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer