발행물
컨퍼런스
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM)
2021
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Development of phase-modulation algorithm for measurement of transparent plate using wavelength-tuned interferometer
Surface profiling of silicon wafer using wavelength-tuned phase-shifting interferometry and polynomial window function
2020
Simultaneous measurement of optical flats using wavelength-tuned interferometer and fringe analysis
SPIE Photonics West
Precision interferometric thickness measurement of optical flat using wavelength tuning Fizeau interferometer
Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation