발행물
컨퍼런스
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM)
2023
,
Surface measurement of silicon wafer using phase extraction based on deep learning and Fizeau interferometer
Measurement of optical thickness variations of transparent plate by using three surface interferometer during wavelength modulation
Design of Gaussian phase-shifting algorithm for surface profile measurement of a silicon wafer
SPIE Optical Metrology
Scanning phase-calculation formula for surface profiling of optical flat using Fizeau interferometer
Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer