발행물
컨퍼런스
1st International Conference on Surface Engineering
2013
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Surface Conditioning of Graphene by using CO2 Cluster Jet
International Conference on Planarization/CMP Technology
Abrasive Material Type and Their Effect on Removal Rate Change Trend in Pad Lifetime
224th ECS meeting
Surface Cleaning Using CO2 Gas Cluster for Semiconductor Devices
2013 한국입자에어로졸학회 학술대회
Silane 나노입자 제조용 플라즈마 반응기 내 합성반응 모사
2013 International Forum on Functional Materials
Real-time FET based biosensor using Air sampler