발행물
컨퍼런스
2012 International Conference on Planrization/CMP Technology
2012
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Synergetic effect of polishing debris cleaning in real time
2012 International Conference on Planarization/CMP Technology
Synthesis of PS-SiO2 raspberry structure nanoparticle for CMP slurry
The study of POU filter performance and life-time in the CMP slurry supply system
2012 International Sysmposium on Contamination Control
In-situ size measurement and analysis of Si nanoparticles using PBMS
Particle free atomic layer deposition of transparent conductive oxide for flexible organic solar cell