High quality conformal silicon oxide films prepared by multi-step sputtering PECVD and chemical mechanical polishing

Low temperature polycrystalline silicon thin film transistors

A novel thin film transistor using double amorphous silicon active layer

Low temperature solid phase crystallization of amorphous silicon using (Au+Ni) solution

Low temperature metal induced crystallization of amorphous silicon using a Ni solution

Electrical properties of Cl incorporated hydrogenated amorphous silicon

Fabrication of amorphous silicon p-i-n Sollar cells using ion shwer doping technique

Deposition of n-type diamondlike carbon by using the layer-by-layer technique and its electron emission properties.

A Novel Self-aligned Polycrystalline Silicon Thin-Film Transistor Using Silicide Layers

Temperature dependent leakage currents in polycrystalline silicon thin film transistors