발행물
컨퍼런스
한국화학공학회 봄학술대회
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High aspect ratio etch simulation for next-generation semiconductor fabrication process
FITC functionalized field-effect transistor platform for real time detection of copper ions
The 9th International conference on microelectronics and plasma technology
Theoretical Approach of Atomic Layer Deposition (ALD)/Atomic Layer Etching
Materials Challenges in Alternative and Renewable Energy 2024
Study on surface functionalization for highly sensitive non-enzymatic diquat pesticide detection
SPIE Advanced Lithography + Patterning
Role of surface reaction model in the next-generation plasma oxide etch process