,

Basic study on surface functionalization of FITC for field effect transistor

,

Study on the diffusion effects through a two-layer surface reaction model for fluorocarbon plasma etching process

,

Realistic process simulation of high aspect ratio etching process

,

반도체공정 전산모사의 현황과 전망

,

Emerging issue analysis of high aspect ratio etching with a realistic 3D topography simulation platform