Taewook Nam, Jonathan L. Partridge, Steven M. George
,
2
Area-selective ALD of ZnS
Taewook Nam, Steven M. George
,
3
Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions
Taewook Nam, Troy A. Colleran, Jonathan L. Partridge, Andrew S. Cavanagh, Steven M. George
Chemistry of Materials, 2024
4
Atomic Layer Deposition of Pt Nanoparticles Using Dimethyl(N, N‑dimethyl-3-butene-1-amine‑N) Platinum and H₂ Reactant and Its Application to 2D WS₂ Photodetectors
Dain Shin, Inkyu Sohn, Donghyun Kim, Jaehyeok Kim, Taewook Nam, Youngjun Kim, Jusang Park, Tatsuya Nakazawa, Seung-min Chung, Hyungjun Kim
Journal of Vacuum Science and Technology A,
5
Growth Mechanism and Electrical Properties of Tungsten Films deposited by Plasma-enhanced Atomic Layer Deposition with Chloride and Metal
Taewook Nam, Troy A. Colleran, Jonathan L. Partridge, Andrew S. Cavanagh, Steven M. George
Chemistry of Materials, 2023
6
Hydrogen Barrier based on Chemical Trapping using Chemically–modulated Al₂O₃ grown by Atomic Layer Deposition for InGaZnO Thin Film Transistor
Yujin Lee, Taewook Nam, Seunggi Seo, Hwi Yoon, Chong Hwon Lee, Hyukjoon Yoo, Hyun Jae Kim, Wonjun Choi, Seongil Im, Joon Young Yang, Dong Wook Choi, Choongkeun Yoo, Ho-jin Kim, Hyungjun Kim
ACS Applied Materials & Interfaces, 2021
7
Dong Wook Choi, Choongkeun Yoo, Ho-jin Kim, Hyungjun Kim