발행물

전체 논문

31

11

Comparative Study on Atomic Layer Deposition of HfO₂ via Substitution of Ligand Structure with Cyclopentadiene
Sungmin Park, Bo-Eun Park, Hwi Yoon, Sanghun Lee, Taewook Nam, Taehoon Cheon, SooHyun Kim, Hwansung Cheon, Sangkyun Im, Taegeun Seong, Hyungjun Kim
Journal of Materials Chemistry C, 2020

12

Atomic layer deposition for nonconventional nanomaterials and their applications
Taewook Nam, Hyungjun Kim
Journal of Materials Research, 2020

13

Moisture Barrier Properties of Low-temperature ALD Al₂O₃ using Various Oxidants
Taewook Nam, Haksoo Lee, Sung Min Cho, Bonggeun Shong, Han-Bo-Ram Lee, Hyungjun Kim
Ceramics International, 2019

14

Hydrogen Barrier Performance of Lanthanum Oxide Deposited by Reactive Magnetron Sputtering
Yujin Lee, Chong Hwon Lee, Taewook Nam, Sanghun Lee, Il-Kwon Oh, Joon Young Yang, Dong Wook Choi, Choongkeun Yoo, Ho-jin Kim, Woo-Hee Kim, Hyungjun Kim
Journal of Material Science, 2019

15

Low-temperature, High-growth-rate ALD of SiO₂ using Novel Aminodisilane Precursor
Taewook Nam, Hyunho Lee, Taejin Choi, Seunggi Seo, Chang Mo Yoon, Yunjung Choi, Heonjong Jeong, Hima K. Lingam, Venkateswara R. Chitturi, Andrey Korolev, Jong-Hyun Ahn, Hyungjun Kim
Applied Surface Science, 2019

16

Molecular Oxidation of Surface -CH₃ During Atomic Layer Deposition of Al₂O₃ with H₂O, H₂O₂, and O₃: A Theoretical Study
Seunggi Seo, Taewook Nam, Han-Bo-Ram Lee, Hyungjun Kim, Bonggeun Shong
Applied Surface Science, 2018

17

High-Performance Ink-Synthesized Cu-Gate Thin-Film Transistor with Diffusion Barrier Formation
Whang Je Woo, Taewook Nam, Il‑Kwon Oh, Wanjoo Maeng, Hyungjun Kim
Metals and Materials International, 2018

18

Cobalt Titanium Nitride Amorphous Metal Alloys by Atomic Layer Deposition
Taewook Nam, Chang Wan Lee, Taehoon Cheon, Woo Jae Lee, Soo-Hyun Kim, Se-Hun Kwon, Hyungjun Kim, Han-Bo-Ram Lee
Journal of Alloys and Compounds, 2018

19

Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating
Seong Jun Yoon, Kwanyong Pak, Taewook Nam, Alexander Yoon, Hyungjun Kim, Sung Gap Im, Byung Jin Cho
ACS Nano, 2017

20

A Composite Layer of Atomic-layer-deposited Al₂O₃ and Graphene for Flexible Moisture Barrier
Taewook Nam, Yong Ju Park, Haksoo Lee, Il-Kwon Oh, Jong-Hyun Ahn, Sung Min Cho, Hyungjun Kim, Han-Bo-Ram Lee
Carbon, 2017