Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

Single-shot characterization of multi-film structures based on combined spectral interferometry and spatially recorded spectroscopic ellipsometry

High-speed polarized low coherence scanning interferometry based on spatial phase shifting

Rigorous single pulse imaging for ultrafast interferometric observation

Direct instantaneous 2-D imaging for photoacoustic waves by ultrashort single pulse interferometry

Novel combined measurement system to characterize film structures by spectral interferometry and ellipsometry

High-speed combined NIR low-coherence interferometry for wafer metrology

SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis

Dual low coherence scanning interferometry for rapid large step height and thickness measurements

Note: Near infrared interferometric silicon wafer metrology