발행물
컨퍼런스
The 17th International Symposium on Integrated Ferroelectrics
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Electrical Characterization of Nickel Oxide Thin Films Deposited by Reactive Sputtering for Memory Application
Formation of Si Nanostructure by Dry Etching Using Self-Organized Metal Oxide Nanopillar Mask
Metal-Insulator Transitions In Polycrystalline VOx Thin Films
2003 International Symposium on Magnetic Materials and Applications
Etch characteristics of CoZrNb and CoFeTb magnetic films in a high density plasma
The 50th American Vacuum Society International Symposium
Nanometer-Sized Etching of Polysilicon Thin Films in a High Density Plasma