,

Dry Etching of Pt/Pb(ZrXTi1-X)O3/Pt Thin Film Capacitors in an Inductively Coupled Plasma (ICP) for Nonvolatile Semiconductor Memory Applications

,

Fabrication of Ferroelectric Capacitors Using RuO2/Pt Electrode

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Reactive Ion Etching Damage to Ferroelectric Thin Films Capacitors

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The Characterization and Electrical Properties of Doped PZT Thin Films prepared by Sol-Gel Processing

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Study on Multilayered Electrodes for Ferroelectric Thin Film Capacitors