Growth of amorphous silicon oxide nanowires in the absence of a Si precursor through a solid state transformation

Study of Hafnium Silicate Treated with NO Gas Annealing

Effects of Annealing Temperature on the Electrical Properties of ALD-Grown Hf-Silicate Films Having Various Si Contents

비 Si 기판을 이용한 차세대 반도체 소자 기술의 특징 및 발전 방향

In-situ annealing study on the thermal stability of nickel germanides

Physical and electrical characteristics of atomic-layer-deposited Hf-silicate thin films using Hf[N(CH3)(C2H5)](4) and SiH[N(CH3)(2)](3) precursors

SPUTTER SEEDING을 이용한 CVD CU 박막의 비선택적 증및 기판의 영향

THE FORMATION AND PHASE STABILITY OF COALT - ALUMINIDE (COAL) THIN FILM ON GAAS

기판 ETCHING 기법을 이용한 DLC 필름의 탄성특성 평

Formation and Thermal Stability of Ti-capped Co Silicide from Co-Ta Alloy Films on (100) Si and Polycrystalline Silicon