Design of zinc ferrite thin films with excess tetrahedrally coordinated Fe3+ ions and their magnetic interactions
JP Singh, S Lee, KH Chae
Vacuum, 1970
32
X-ray-powered micromotors
Z Xu, M Chen, H Lee, SP Feng, JY Park, S Lee, JT Kim
ACS applied materials & interfaces, 1970
33
Imaging behavior of highly fluorinated molecular resists under extreme UV radiation
H Oh, SH Jung, JS Mun, K Kim, S Lee, JK Lee
Advances in Patterning Materials and Processes XXXVI, 1970
34
Variable field of view full field transmission X-ray microscope
J Lim, S Lee, J Park, Y Roh, Y Kim
Microscopy and Microanalysis, 1970
35
X-ray beam-position feedback system with easy-to-use beam-position monitor
JY Park, Y Kim, S Lee, J Lim
Journal of Synchrotron Radiation, 1970
36
Early commissioning results for spectroscopic X-ray Nano-Imaging Beamline BL 7C sXNI at PLS-II
S Lee, IH Kwon, JY Kim, SS Yang, S Kang, J Lim
Journal of synchrotron radiation, 1970
37
A novel concept for actinic EUV mask review tool using a scanning lensless imaging method at the Swiss Light Source
S Lee, M Guizar-Sicairos, Y Ekinci
Proc. SPIE 9048, 1970
38
Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithography
S Lee, I Lee, J Gul Doh, J Uk Lee, S Hong, J Ahn
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 1970
39
Effect on critical dimension performance for carbon contamination of extreme ultraviolet mask using coherent scattering microscopy and in-situ contamination system
J Doh, S Lee, J Lee, S Hong, CY Jeong, DG Lee, SS Kim, J Ahn
Japanese Journal of Applied Physics, 1970
40
Carbon Contamination Analysis and Its Effect on Extreme Ultra Violet Mask Imaging Performance Using Coherent Scattering Microscopy/In-Situ Accelerated Contamination System
Chang Young Jeong, Sangsul Lee, Jong Gul Doh, Jae Uk Lee, Han-sun Cha, William T Nichols, Dong Gun Lee, Seong Sue Kim, Han Ku Cho, Seung-yu Rah, Jinho Ahn