2020.11

,

Chemical-mechanical polishing of soft pad asperity with protective hard thin film

2020.11

,

Surface-enhanced Raman scattering on the warped nanopatterns fabricated by multiple exposure interference lithography

2020.09

,

Characterization of CMP process at single contact point of pad micro-asperity

2020.07

,

Multi-angle exposure in laser interference lithography for high performance reproducible SERS Biosensors

2019.10

,

Additive manufacturing of 3D surface structures for electromechanical adhesion and tactile sensing