발행물
컨퍼런스
6th CIRP International Conference on High Performance Cutting
2014.06
,
The effect of pad-asperity curvature on materical removal rate in chemical-mechanical polishing
American Society of Precision Engineering (ASPE) Spring Meeting
2013.04
The effect of pad surface plasticity in chemicalmechanical polishing
222th Electrochemical Society (ECS) Meeting
2012.10
Scratching of patterned composite surfaces by pad asperities in chemical-mechanical polishing
220th Electrochemical Society (ECS) Meeting
2011.10
The effect of mechanical and tribological properties of coatings on scratch generation in chemical-mechanical polishing
Korean Society of Precision Engineering (KSPE) Spring Meeting
2010.05
Taper removal of hole entrance in micro drilling using a nanosecond pulsed laser