ICPT 2025

Effect of Synthesis Materials and Process Parameters on Polyvinyl Acetal (PVA) Brushes Properties and Incoming Impurities

2025

ICPT 2025

Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning

2025

ICSCRM 2025

Particle Removal Mechanism on 4H-SiC Surface by Comparison with Si Surface

2025

ICSCRM 2025

Chelation-Assisted Cleaning for Effective Removal of Al and Mn Contaminants on 4H-SiC Wafer

2025

ICSCRM 2025

Improved Particle Removal and Sub-Nanometer Roughness Control in 4H-SiC Wafers Using PVA Brush Conditioning

2025