발행물
컨퍼런스
SPCC (The Surface Preparation and Cleaning Conference)
2019
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Optimization of Water Polishing for an Improved Abrasive Removal
Investigation of Ceria Abrasive Removal during Post Chemical Mechanical Polishing Cleaning
2019년 한국진공학회 동계정기학술대회
Anodizing Aluminum 성능 평가 및 저하 원인 연구
International Conference on Planarization/CMP Technology 2018
2018
A Method for Size Distribution Measurement of Sub-100 nm Colloidal Silica Nanoparticles and its Application to CMP Slurry
International Conference on CMP/Planarization Technology 2018
Effects of Amino Acids for High Silicon Oxide Removal Rate