발행물
컨퍼런스
Advanced Metallization Conference
2008
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Tuning Depth Profiles of Low-k Dielectrics with UV Curing
13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection
Optimizing CMP for Ultra-Low-k Dielectrics
The 9th International Conference on Tissue Banking
2002
Finding the Ideal Freezing Curve According to the Various Tissues with Indirect Thermophysical Calculation
Effects of CMP Slurry Surfactants on the Fracture of Nanoporous Low-k Dielectrics
2006
2007 IEEE International Interconnect Technology Conference
2007
Stress and Slurry Chemistry Effects on CMP Damage of Ultra-Low-k Dielectrics