Effect of electrode spacing on the density distributions of electrons, ions, and metastable and radical molecules in SiH4/NH3/N2/He capacitively coupled plasmas
김호준, Wonkyun Yang, Junghoon Joo
Journal of Applied Physics, 2015
42
Stress control of sputtered W film using W/WN multilayer
김호준, Dong-Hoon Han, Jong-yong Bae, Se Jun Park, Won-Ki Jung, Jaihyung Won