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Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks in a CH4/O2/Ar Plasma

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Inductively Coupled Plasma Reactive Ion Etching of MgO Thin Films in CH4/Ar plasma

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The influence of O2 gas on the etch characteristics of FePt thin films in CH4/O2/Ar gas

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Morphological Structural and Electrical Properties of DC Magnetron Sputtered Mo Thin Films for Solar Cell Application

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Effect of the substrate temperature on the characteristics of CIGS thin films by RF magnetron sputtering using a Cu(In1-xGax)Se2 single target