,

Influence of Heat Treatment on the Structural, Electrical and Optical Properties of Aluminum-Doped Zinc Oxide Thin Films Prepared by Magnetron Sputtering

,

Etch Characteristics of CoFeB Magnetic Thin Films Using High Density Plasma of a H2O/CH4/Ar Gas Mixture

,

Investigation on Etch Characteristics of MgO Thin Films Using a H2O/CH4/Ar Plasma

,

Investigation on Etch Characteristics of FePt Thin Films Using a H2O/Ar Plasma

,

Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks Using a H2O/Ar Mixture