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4성분 단일 타겟을 이용한 RF 마그네트론 스퍼터링으로 증착된 CIGS 박막의 황화열처리의 영향

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Effect of sulfurization on CIGS thin films by RF magnetron sputtering using a Cu(In1-xGax)Se2 single target

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Etch Characteristics of MgO Thin Films in Cl2/Ar, CH3OH/Ar, and CH4/Ar Plasmas

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Conformal contact printing of thin metal patterns

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Characterization of CIGS thin films by RF magnetron sputtering using a Cu(In1-xGax)Se2 single quaternary target without post-annealing