,

Characterization of multi-stacks CIGS thin films by RF magnetron sputtering using Cu(In1-xGax)Se2 single quaternary targets

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Cu(In,Ga)Se2 (CIGS) 광흡수층의 buffer layer로서의 RF sputter에 의한 CdS 박막 성장

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Influence of post-treatment on properties of CIGS thin films deposited by RF magnetron sputtering using a quaternary single target for photovoltaic devices

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Comparison of Etch Characteristics of CoFeB Magnetic Thin Films Using CH3OH, CH4 and H2O Plasmas

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Effect of H2O Gas on Etch Characteristics of Magnetic Tunnel Junction Stacks Using a H2O/CH3OH Plasma