발행물
컨퍼런스
The 3rd USA International Conference on Surfaces, Coatings and NanoStructured Materials
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Etching of Palladium thin films using C2H5OH/Argasmixture
제23회 한국반도체 학술대회
Effect of Etching Gas on Magnetic Tunnel Junction Stacks Using Inductively Coupled Plasma Reactive Ion Etching
High density plasma etching of Palladium thin films
International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)
Dry etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas Mixture
Etch Characteristics of Ta Thin Films Using Halogen Containing Gas Mixtures in Inductively Coupled Plasma for Hard Mask Applications