,

Study on etch characteristics of nanometer-scale patterned CoFeB magnetic thin films using various etch gases

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Anisotropic etching of nanometer-scale patterned MTJ stacks under various etch gases

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Influence of non-corrosive etch gases containing C, H, and O elements on magnetic properties of CoPt superlattice

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Investigation on Etch Characteristics of Nanometer-Scale Patterned CoFeB Thin Films Using Pulse Modulated Plasma

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Etch Characteristics of Nanometer Scale Masked MTJ stacks Using Pulse Modulated Plasmas