발행물
컨퍼런스
International Conference of The Asian Union of Magnetics Societies 2010
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Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM
Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
2010 한국공업화학회 추계 정기총회 및 연구논문발표회
Electrical, Structural and Optical Properties of ZnO Thin Films Prepared by Magnetron Sputtering
Investigation on High Density Plasma Reactive Ion Etching of CoFeB Thin Films For Nonvolatile Magnetic Random Access Memory
10th International Conference on Nanotechnology and IEEE Nano 2010
Investigation on Etch Characteristics of Nanometer-Sized Magnetic Tunnel Junction Stacks Using a HBr/Ar Plasma