A 22nm SoC platform technology featuring 3-D tri-gate and high-k/metal gate, optimized for ultra low power, high performance and high density SoC applications
C.-H. Jan, Uma Bhattacharya, R. Brain, S.-J. Choi, G. Curello, Garima Gupta, W. Hafez, M. Jang, Myounggon Kang, K. Komeyli, T. Leo, N. Nidhi, L. Pan, Jang Hyeok Park, K. Phoa, Anisur Rahman, Chad Staus, Hiroyuki Tashiro, C. Tsai, P. Vandervoorn, L. Yang, J.-Y. Yeh, Peng Bai
2012