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100

51

Etching Properties of HfO2 Thin Films in Cl2/Bcl3/Ar Plasma
Dong-Pyo Kim, Gwan-Ha Kim, Jong-Chang Woo, Xue-Yang, Doo-Seung Um, Chang-Il Kim*
Ferroelectrics, 2009

52

Surface Reaction of TaN Metal Gate Etching by using Inductively Coupled Plasma
Doo-Seung Um, Dong-Pyo Kim, Gwan-Ha Kim, Jong-Chang Woo, Chang-Il Kim*
J. Korean Phys. Soc., 2009

53

Chemical Reaction on the Surface of As-Doped ZnO Thin Films during the Dry Etching Process
Chan-Min Kang, Dong-Pyo Kim, Doo-Seung Um, Chang-Il Kim*
J. Korean Phys. Soc., 2009

54

Biodegradable and healable strain gauge based on Ti3C2TX MXene-gelatin hydrogel composite for eco-friendly applications
엄두승, 한현구, 이동건, 김지엽, 진미진, 박승영, 김창일
MATERIALS RESEARCH EXPRESS, 2025

55

Role of ZnO Capping Layer for Stability in Silver-nanowire-based Functional Heater Arrays
엄두승, Sejin Kim, Dong-Geon Lee, Qiang Liu, Mi-Jin Jin, Bo Hou, Seungyoung Park, Ji-Yeop Kim, Chang-Il Kim
SENSORS AND MATERIALS, 2024

56

Diverse Texturing Characteristics Through Metal-Assisted Plasma Etching with Silver Nanowires
엄두승, Dong-Geon Lee, Hyun-Seung Ryu, Mi-Jin Jin, Chang-Il Kim
PLASMA CHEMISTRY AND PLASMA PROCESSING, 2024

57

Transition of Cu film to Cu2O film through oxygen plasma treatment
엄두승, Qiang Liu, 김지엽, 진미진, 김창일
MATERIALS CHEMISTRY AND PHYSICS, 2024

58

Nanohole texturing to improve the performance of a microscopic photodetector
엄두승, 이동건, 최경근, 김덕기, 김창일
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2024

59

Reducing the oxygen vacancy concentration in SrTiO3-d thin films via an optimized O2 plasma treatment for enhancing device properties
엄두승, 김지엽, 진미진, Bo Hou, 김민수, 김창일
APPLIED SURFACE SCIENCE, 2023

60

Etching characteristics and surface modification of InGaSnO thin films under Cl2/Ar plasma
엄두승, 주영희, 최재원, Bo HOU, 권혁인, 김창일
PLASMA SCIENCE & TECHNOLOGY, 2023