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Synthesis of Perovskite SrTiO3 Thin Films by Atomic Layer Deposition of SrF2 and TiO2

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Development of Atomic Layer Etching of ZrO2 Thin Films Using NF3 Plasma and TiCl4

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Mobility Improvement of Amorphous Insulator and Crystalline Semiconductor Nanolaminate Structure Grown by Atomic Layer Deposition

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Synthesis of SrTiO3 Thin Films Using Atomic Layer Deposition with Sr(dmts)(hfac)2/Water and (CpMe5)Ti(OMe)3/Ozone on TiN Substrates

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Enhancement of Dielectric Constant through Highly Stoichiometric TiO2 Thin Films Using Ozone Post-treatment