발행물
컨퍼런스
The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)
,
Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment
Poster presentations by 이재준 and 김형준 석사과정
Enhancing Resistive Switching Properties of TiO2 Thin Films Grown by Atomic Layer Deposition through Pyramid-Structured PDMS Substrate. / poster - 이재준 석사과정; Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment / poster - 김형준 석사과정
한국전기전자재료학회 하계학술대회
poster session 최우수상 수상
Poster presentations: "Enhancing Resistive Switching Properties of TiO2 Thin Films Grown by Atomic Layer Deposition through Pyramid-Structured PDMS Substrate." and "Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment"