2031.07

,

Reducing Micro-defect Formation in Atomic Layer Deposited SrTiO3 Films during Crystallization Annealing

2029.06

,

Controlling initial growth behavior of ALD-SrTiO3 films Using the interposed ALD-Al2O3 layers

2029.01

,

Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone

2028.10

,

Atomic Layer Deposition of High-k Oxide Thin Films

2026.06

,

Atomic Layer Deposited RuO2 Electrode Flim with Wide ALD Window